Elastic modulus and structural evolution of diamond-like carbon films deposited by RF-PACVD
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Diamond and Related Materials
سال: 2002
ISSN: 0925-9635
DOI: 10.1016/s0925-9635(02)00044-4